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Semiconductor Sensors |
| Editor: S. M. Sze (National Chiao Tung Univ., Hsinchu, Taiwan) |
| An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
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| Cloth Bound |
Pages, 6-1/8 x 9-1/4 in.
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Item #:
Price: |
0471546097
$150.00 |
John Wiley & Sons, Inc. | |
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