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Glow Discharge Processes: Sputtering and Plasma Etching |
| Brian Chapman (Burroughs Corp.) |
| Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applicationsÂpractical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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| Cloth Bound |
Pages, 6-1/8 x 9-1/4 in.
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Item #:
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047107828X
$195.00 |
John Wiley & Sons, Inc. | |
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